IMAGING-PLATE PLANE-WAVE X-RAY TOPOGRAPHY OF LOCAL LATTICE DISTRIBUTION DUE TO GROWTH STRIATIONS IN SILICON-CRYSTALS

被引：9

作者：

MAEKAWA, I ^{[1
]}

KUDO, Y ^{[1
]}

KOJIMA, S ^{[1
]}

KAWADO, S ^{[1
]}

ISHIKAWA, T ^{[1
]}

机构：

[1] UNIV TOKYO, FAC ENGN, BUNKYO KU, TOKYO 113, JAPAN

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 23期

关键词：

D O I：

10.1063/1.109163

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A newly developed imaging-plate plane-wave x-ray topography (IPPWT) method has been successfully applied to the quantitative analysis of local lattice distortion due to growth striations in magnetic-field-applied Czochralski silicon single crystals. IPPWT was found to possess sufficient spatial resolution to accurately measure variations of growth-induced local lattice distortions (DELTAd/d and DELTAalpha. The advantageous features of IPPWT, in comparison with conventional photographic-plate plane-wave x-ray topography, are a wide latitude in x-ray exposure conditions, better x-ray intensity linearity for performing quantitative analysis, and convenience in image processing and data handling.

引用

页码：2980 / 2982

页数：3

共 10 条

[1]

ABE T, 1985, VLSI ELECT MICROSTRU, V12, P3

[2] A STORAGE PHOSPHOR DETECTOR (IMAGING PLATE) AND ITS APPLICATION TO DIFFRACTION STUDIES USING SYNCHROTRON RADIATION [J].

AMEMIYA, Y ;

SATOW, Y ;

MATSUSHITA, T ;

CHIKAWA, J ;

WAKABAYASHI, K ;

MIYAHARA, J .

TOPICS IN CURRENT CHEMISTRY-SERIES, 1988, 147 :121-144

[3] CZOCHRALSKI SILICON-CRYSTALS GROWN IN A TRANSVERSE MAGNETIC-FIELD [J].

HOSHI, K ;

ISAWA, N ;

SUZUKI, T ;

OHKUBO, Y .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (03) :693-700

[4] X-RAY TOPOGRAPHY WITH HIGHLY COLLIMATED BEAM AT PHOTON FACTORY [J].

ISHIKAWA, T .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) :2490-2493

[5]

Ishikawa T., 1991, HDB SYNCHROTRON RAD, V3, P63

[6]

KAWADO S, 1991, DEFECTS SILICON, V2, P65

[7]

Meieran E. S., 1980, Characterization of Crystal Growth Defects by X-Ray Methods. Proceedings of the NATO Advanced Study Institute on Characterization of Crystal Growth Defects by X-Ray Methods, P1

[8]

MORI N, 1990, J ELECTRON MICROSC, V39, P433

[9]

OIKAWA T, 1990, J ELECTRON MICROSC, V39, P437

[10] COMPUTED RADIOGRAPHY UTILIZING SCANNING LASER STIMULATED LUMINESCENCE [J].

SONODA, M ;

TAKANO, M ;

MIYAHARA, J ;

KATO, H .

RADIOLOGY, 1983, 148 (03) :833-838

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