CHEMICAL HETEROGENEITY IN OFF STOICHIOMETRY A-SIXNYHZ FROM A COLLECTIVE VIBRATIONAL-MODES STUDY

被引：18

作者：

CHAUSSAT, C

BUSTARRET, E

DENEUVILLE, A

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷

关键词：

D O I：

10.1016/0022-3093(85)90810-5

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：917 / 920

页数：4

共 7 条

[1] INFLUENCE OF STOICHIOMETRY AND HYDROGEN-BONDING ON THE INSULATING PROPERTIES OF PECVD SILICON-NITRIDE [J].

CHAUSSAT, C ;

BUSTARRET, E ;

BRUYERE, JC ;

GROLEAU, R .

PHYSICA B & C, 1985, 129 (1-3) :215-219

[2] THE STRUCTURE OF PLASMA-DEPOSITED SILICON-NITRIDE FILMS DETERMINED BY INFRARED-SPECTROSCOPY [J].

KNOLLE, WR ;

OSENBACH, JW .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (03) :1248-1254

[3] WIDE OPTICAL-GAP, PHOTOCONDUCTIVE A-SIXN1-X-H [J].

KURATA, H ;

HIROSE, M ;

OSAKA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (11) :L811-L813

[4] NITROGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED ALPHA-SI-H FILMS [J].

LUCOVSKY, G ;

YANG, J ;

CHAO, SS ;

TYLER, JE ;

CZUBATYJ, W .

PHYSICAL REVIEW B, 1983, 28 (06) :3234-3240

[5] ANNEALING AND CRYSTALLIZATION PROCESSES IN TETRAHEDRALLY BONDED BINARY AMORPHOUS-SEMICONDUCTORS [J].

MORIMOTO, A ;

KATAOKA, T ;

KUMEDA, M ;

SHIMIZU, T .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 50 (04) :517-537

[6] VIBRATIONAL ABSORPTION-BANDS FOR IMPLANTED NITROGEN IN CRYSTALLINE SILICON [J].

STEIN, HJ .

APPLIED PHYSICS LETTERS, 1983, 43 (03) :296-298

[7] RAMAN AND IR ABSORPTION SPECTROSCOPIC STUDIES ON ALPHA,BETA, AND AMORPHOUS SI3N4 [J].

WADA, N ;

SOLIN, SA ;

WONG, J ;

PROCHAZKA, S .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1981, 43 (01) :7-15

← 1 →