ADSORPTION-INDUCED SURFACE STRESS AND ITS EFFECTS ON RESONANCE FREQUENCY OF MICROCANTILEVERS

被引：470
|
作者：
CHEN, GY
THUNDAT, T
WACHTER, EA
WARMACK, RJ
机构：
[1] Health Sciences Research Division, Oak Ridge National Laboratory, Oak Ridge
来源：
JOURNAL OF APPLIED PHYSICS | 1995年 / 77卷 / 08期
关键词：
D O I：
10.1063/1.359562
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
It is well known that bimetallic microcantilevers can exhibit static deflection as a result of thermal effects, including exothermic adsorption of chemicals on their surfaces. It is shown here that the resonance frequency of a cantilever can change due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending that is induced by differential surface stress. The magnitude of these effects depends upon the chemical properties of the surface and upon the amount of material adsorbed. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemical sensors. © 1995 American Institute of Physics.
引用
收藏
页码：3618 / 3622
页数：5
相关论文
共 50 条
  • [1] Adsorption-induced surface stress effect on the resonance behavior of a quartz crystal microbalance
    Zhuang, H.
    Lu, P.
    Lim, S. P.
    Proceedings of the 8th Biennial Conference on Engineering Systems Design and Analysis, Vol 2, 2006, : 947 - 953
  • [2] Adsorption-induced resonance frequency shift in Timoshenko microbeams
    Gheshlaghi, Behnam
    Hasheminejad, Seyyed M.
    CURRENT APPLIED PHYSICS, 2011, 11 (04) : 1035 - 1041
  • [3] Model for the adsorption-induced change in resonance frequency of a cantilever
    Huang, Gan-Yun
    Gao, Wei
    Yu, Shou-Wen
    APPLIED PHYSICS LETTERS, 2006, 89 (04)
  • [4] Surface effects of adsorption-induced resonance analysis on micro/nanobeams via nonlocal elasticity
    Xu, Xiao-jian
    Deng, Zi-chen
    APPLIED MATHEMATICS AND MECHANICS-ENGLISH EDITION, 2013, 34 (01) : 37 - 44
  • [5] Surface effects of adsorption-induced resonance analysis on micro/nanobeams via nonlocal elasticity
    徐晓建
    邓子辰
    Applied Mathematics and Mechanics(English Edition), 2013, 34 (01) : 37 - 44
  • [6] Surface effects of adsorption-induced resonance analysis on micro/nanobeams via nonlocal elasticity
    Xiao-jian Xu
    Zi-chen Deng
    Applied Mathematics and Mechanics, 2013, 34 : 37 - 44
  • [7] Multiscale analysis of adsorption-induced surface stress of alkanethiol on microcantilever
    Chen, Chuin-Shan
    Chou, Chia-Ching
    Chang, Shu-Wei
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2013, 46 (03)
  • [8] Density functional theory calculations of adsorption-induced surface stress changes
    Harrison, M. J.
    Woodruff, D. P.
    Robinson, J.
    SURFACE SCIENCE, 2008, 602 (01) : 226 - 234
  • [9] Adsorption induced differential surface stress versus adsorption induced resonance frequency change -: A comparison.
    Amírola, J
    Rodríguez, A
    Castañer, L
    Lozano, J
    Gutiérrez, FJ
    Horrillo, MC
    SMART SENSORS, ACTUATORS, AND MEMS II, 2005, 5836 : 441 - 451
  • [10] Influence of surface stress on the resonance behavior of microcantilevers
    McFarland, AW
    Poggi, MA
    Doyle, MJ
    Bottomley, LA
    Colton, JS
    APPLIED PHYSICS LETTERS, 2005, 87 (05)
12345