共 50 条
- [1] The vacuum spark discharge soft X-ray source ADVANCES IN LABORATORY-BASED X-RAY SOURCES AND OPTICS II, 2001, 4502 : 55 - 61
- [2] OPTIMIZATION OF A VACUUM SPARK DISCHARGE AS AN X-RAY SOURCE PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2010, (06): : 168 - 170
- [3] Vacuum spark X-ray source for high speed photography 22ND INTERNATIONAL CONGRESS ON HIGH-SPEED PHOTOGRAPHY AND PHOTONICS, 1997, 2869 : 494 - 501
- [4] X-RAY EMISSION BY A VACUUM SPARK SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1968, 13 (01): : 119 - &
- [5] A vacuum spark point source ford X-ray/EUV lithography EMERGING LITHOGRAPHIC TECHNOLOGIES V, 2001, 4343 : 491 - 496
- [6] Developing small vacuum spark as an x-ray source for calibration of an x-ray focusing crystal spectrometer REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (10):
- [7] Experimental model of industrial x-ray source MSX-1 with a vacuum spark for x-ray lithography JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (02): : 482 - 486
- [10] Spherical pinch (soft X-ray/EUV) and vacuum spark (soft X-ray) for microlithography ELECTRON-BEAM, X-RAY, EUV, AND ION-BEAM SUBMICROMETER LITHOGRAPHIES FOR MANUFACTURING VI, 1996, 2723 : 278 - 287