EFG PROCESS APPLIED TO GROWTH OF SILICON RIBBONS

被引：76

作者：

SWARTZ, JC ^{[1
]}

SUREK, T ^{[1
]}

CHALMERS, B ^{[1
]}

机构：

[1] TYCO LABS INC,WALTHAM,MA 02154

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1975年 / 4卷 / 02期

关键词：

D O I：

10.1007/BF02655405

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：255 / 279

页数：25

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[10] EDGE-DEFINED, FILM-FED GROWTH (EFG) OF SILICON RIBBONS [J].

CISZEK, TF .

MATERIALS RESEARCH BULLETIN, 1972, 7 (08) :731-&

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