ROUND ROBIN STUDY OF IMPURITY ANALYSIS IN GALLIUM-ARSENIDE USING SECONDARY ION MASS-SPECTROMETRY

被引：28

作者：

HOMMA, Y

KUROSAWA, S

YOSHIOKA, Y

SHIBATA, M

NOMURA, K

NAKAMURA, Y

机构：

[1] MATSUSHITA TECHNORES INC, MORIGUCHI, OSAKA 570, JAPAN

[2] SUMITOMO ELECT IND LTD, RES & DEV GRP, OSAKA 554, JAPAN

[3] MITSUBISHI MET CORP, CENT RES INST, OMIYA, SAITAMA 330, JAPAN

[4] NIPPON MIN CORP, CENT RES LABS, TODA, SAITAMA 335, JAPAN

来源：

关键词：

D O I：

10.1021/ac00291a041

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：2928 / 2934

页数：7

共 50 条

[21] SEMIQUANTITATIVE ANALYSIS BY SECONDARY ION MASS-SPECTROMETRY
MORGAN, AE
WERNER, HW
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1977, 2 (03): : 285 - 290
[22] SECONDARY ION MASS-SPECTROMETRY
HEDBAVNY, P
CESKOSLOVENSKY CASOPIS PRO FYSIKU SEKCE A, 1974, 24 (04): : C396 - 397
[23] SECONDARY ION MASS-SPECTROMETRY
WILLIAMS, P
ANNUAL REVIEW OF MATERIALS SCIENCE, 1985, 15 : 517 - 548
[24] SECONDARY ION MASS-SPECTROMETRY
KENWAYJACKSON, C
VACUUM, 1984, 34 (3-4) : 479 - 480
[25] SECONDARY ION MASS-SPECTROMETRY
CAVALLINI, M
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1982, 7 (03): : A50 - A50
[26] SECONDARY ION MASS-SPECTROMETRY
MORRISON, GH
ANALYTICAL CHEMISTRY, 1986, 58 (01) : 1 - 1
[27] SECONDARY ION MASS-SPECTROMETRY
VICKERMAN, JC
CHEMISTRY IN BRITAIN, 1987, 23 (10) : 969 - &
[28] STUDY OF THE BACKGROUND SOURCES IN THE TRACE ANALYSIS OF CARBON USING SECONDARY ION MASS-SPECTROMETRY
KOBAYASHI, J
NAKAJIMA, M
ISHIDA, K
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (04): : 2542 - 2548
[29] MATERIAL ANALYSIS USING SECONDARY ION MASS-SPECTROMETRY AND RELATED TECHNIQUES
LUFTMAN, HS
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1991, 202 : 7 - INOR
[30] INDIVIDUAL ANALYSIS OF NONMETALLIC INCLUSIONS IN STEEL BY USING THE GALLIUM FOCUSED ION-BEAM SECONDARY-ION MASS-SPECTROMETRY
TOMIYASU, B
INAMI, A
ABE, M
NIHEI, Y
TETSU TO HAGANE-JOURNAL OF THE IRON AND STEEL INSTITUTE OF JAPAN, 1995, 81 (10): : 977 - 982