SELECTION CRITERIA FOR OIL-FREE VACUUM PUMPS

被引：3

作者：

DUVAL, P

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575901

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2369 / 2372

页数：4

共 9 条

[1] WILL TOMORROWS HIGH-VACUUM PUMPS BE UNIVERSAL OR HIGHLY SPECIALIZED [J].

DUVAL, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2546-2551

[2] THE MOLECULAR DRAG PUMP - PRINCIPLE, CHARACTERISTICS, AND APPLICATIONS [J].

DUVAL, P ;

RAYNAUD, A ;

SAULGEOT, C .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1187-1191

[3]

Duval P., 1979, Industrial Research/Development, V21, p167, 169

[4]

DUVAL P, 1988, HIGH VACUUM PRODUCTI

[5]

DUVAL P, 1988, LE VIDE, V43, P19

[6] THE EMERGING TECHNOLOGIES OF OIL-FREE VACUUM PUMPS [J].

HABLANIAN, MH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1177-1182

[7] ELIMINATION OF BACKSTREAMING FROM MECHANICAL VACUUM PUMPS [J].

HABLANIAN, MH ;

BEZ, E ;

FARRANT, JL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2612-2615

[8] OIL BACKSTREAMING IN TURBOMOLECULAR AND OIL DIFFUSION PUMPS [J].

MAURICE, L ;

DUVAL, P ;

GORINAS, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :741-745

[9] MECHANICAL HIGH-VACUUM PUMPS WITH AN OIL-FREE SWEPT VOLUME [J].

WYCLIFFE, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2608-2611

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