CHEMICAL SPUTTERING OF TUNGSTEN AT ELEVATED TEMPERATURES

被引：24

作者：

WINTERS, HF

BILLS, DG

DONALDSON, EE

DENISON, DR

机构：

来源：

关键词：

D O I：

10.1063/1.1702685

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1810 / +

页数：1

共 28 条

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