METAL-CLUSTERS IN PLASMA POLYMERIZED MATRICES - GOLD

被引：65

作者：

KAY, E ^{[1
]}

HECQ, M ^{[1
]}

机构：

[1] UNIV ETAT MONS,B-7000 MONS,BELGIUM

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 02期

关键词：

D O I：

10.1063/1.333082

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：370 / 374

页数：5

共 13 条

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[8] PLASMA POLYMERIZATION OF FLUOROCARBONS IN RF CAPACITIVELY COUPLED DIODE SYSTEM [J].

KAY, E ;

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[9] METAL-CONTAINING FLUOROPOLYMER FILMS PRODUCED BY SIMULTANEOUS PLASMA-ETCHING AND POLYMERIZATION - THE SERIES OF PERFLUOROALKANES C1F2(1)+2,C2F2(2)+2,C3F2(3)+2,C4F2(4)+2 [J].

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[10]

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