GAS-PHASE-FUNCTIONALIZED PLASMA-DEVELOPED RESISTS - INITIAL CONCEPTS AND RESULTS FOR ELECTRON-BEAM EXPOSURE

被引：60

作者：

TAYLOR, GN

STILLWAGON, LE

VENKATESAN, T

机构：

来源：

关键词：

D O I：

10.1149/1.2115932

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1658 / 1664

页数：7

共 13 条

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[3]

GREENEICH GS, 1981, J VAC SCI TECHNOL, V19, P1269

[4]

LYNCH WG, COMMUNICATION

[5]

MILLER SM, 1963, J POLYM SCI POL CHEM, P2537

[6]

PEASE RFW, 1982, MAY EL SOC M MONTR

[7]

ROBERTS RL, UNPUB

[8]

SALOVEY R, 1973, RAD CHEM MACROMOLECU

[9] ORGANO-SILICON MONOMERS FOR PLASMA-DEVELOPED X-RAY RESISTS [J].

TAYLOR, GN ;

WOLF, TM ;

MORAN, JM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :872-880

[10]

TAYLOR GN, 1981, SEP P MICR ENG 81, P381