THE FORMATION OF INTERMETALLICS IN CU/IN THIN-FILMS

被引:33
|
作者
ROY, R [1 ]
SEN, SK [1 ]
SEN, S [1 ]
机构
[1] CENT GLASS & CERAM RES INST,CALCUTTA 700032,W BENGAL,INDIA
关键词
D O I
10.1557/JMR.1992.1377
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The kinetics of the formation of intermetallics in the Cu-In bimetallic thin film couple have been studied from room temperature to 432 K by measuring the evolution of composite and contact electrical resistance with time and temperature. The resistivity measurements have been supplemented by x-ray diffraction (XRD), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). Copper reacts with indium even at room temperature to form CuIn intermetallic and assuming a model of defect assisted diffusion into the grains, the activation energy averaged over five different samples is found to be 0.40 eV. The grain boundary diffusion is found to occur with an average activation energy of 0.55 eV. XRD confirms the growth of CuIn intermetallic and on annealing at higher temperature, for copper-rich films copper further reacts with CuIn to form Cu9In4. Further evidences of solid state reactions and grain boundary diffusion through Cu grain boundaries have been obtained from SEM study. TEM indicates the growth of the grain size on annealing and confirms the presence of the CuIn phase.
引用
收藏
页码:1377 / 1386
页数:10
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