ELS STUDY ON THE INITIAL-STAGE OF TI-SILICIDE FORMATION ON SI(111) AT ROOM-TEMPERATURE

被引：31
作者：
IWAMI, M
HASHIMOTO, S
HIRAKI, A
机构：
来源：
SOLID STATE COMMUNICATIONS | 1984年 / 49卷 / 05期
关键词：
D O I：
10.1016/0038-1098(84)90663-X
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：459 / 462
页数：4
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