DIFFUSION OF CD IN INP AND IN0.53GA0.47AS

被引:12
作者
AYTAC, S
SCHLACHETZKI, A
机构
关键词
D O I
10.1016/0022-0248(83)90265-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:169 / 173
页数:5
相关论文
共 15 条
[1]   CARRIER DENSITY PROFILES IN ZN-DIFFUSED AND CD-DIFFUSED INP [J].
ANDO, H ;
SUSA, N ;
KANBE, H .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (03) :L197-L200
[2]   SHALLOW AND SELECTIVE DIFFUSION OF ZINC IN INDIUM-PHOSPHIDE [J].
AYTAC, S ;
SCHLACHETZKI, A .
SOLID-STATE ELECTRONICS, 1981, 24 (01) :57-&
[3]   DIFFUSION-PROFILE MEASUREMENT IN INP WITH SCHOTTKY DIODES [J].
AYTAC, S ;
SCHLACHETZKI, A .
SOLID-STATE ELECTRONICS, 1982, 25 (11) :1135-&
[4]  
CASEY HC, 1973, ATOMIC DIFFUSION SEM, pCH6
[5]   DIFFUSION OF CD AND ZN IN INP BETWEEN 550 AND 650-DEGREES-C [J].
CHAND, N ;
HOUSTON, PA .
JOURNAL OF ELECTRONIC MATERIALS, 1982, 11 (01) :37-52
[6]   DIFFUSION OF CD INTO INP AT 680-DEGREES-C [J].
DUTT, BV ;
CHIN, AK ;
BONNER, WA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (09) :2014-2019
[7]   AN OPEN-TUBE METHOD FOR DIFFUSION OF ZINC INTO GAAS [J].
FIELD, RJ ;
GHANDHI, SK .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (07) :1567-1570
[8]   ANOMALOUS IMPURITY DIFFUSION IN III-V COMPOUNDS - THE CONSEQUENCE OF SELF-INDUCED FIELD EFFECTS [J].
HILDEBRAND, O .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 72 (02) :575-584
[9]   GROWTH AND CHARACTERIZATION OF INGAASP LATTICE-MATCHED TO INP [J].
HOUSTON, PA .
JOURNAL OF MATERIALS SCIENCE, 1981, 16 (11) :2935-2961
[10]   TRANSFERRED-ELECTRON EFFECT IN IN0.53GA0.47AS [J].
KOWALSKY, W ;
SCHLACHETZKI, A .
ELECTRONICS LETTERS, 1983, 19 (06) :189-190