ANALYSIS OF AN AMBIENT-TEMPERATURE INFLUENCE ON THE THERMAL THIN-FILM MICROSENSOR

被引：6

作者：

BERLICKI, TM

MURAWSKI, E

OSADNIK, SJ

PROCIOW, EL

机构：

[1] Technical University, Institute of Electron Technology, Wrocław

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 45卷 / 03期

关键词：

MICROSENSORS; THERMAL SENSORS; THIN-FILM SENSORS;

D O I：

10.1016/0924-4247(94)00832-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the relation between material parameters, construction, ambient temperature and sensitivity of a thin-film thermal sensor. Measurement results supporting our calculations are presented for a gas-flow and effective-power microsensor in which the Seebeck effect is used between Ni and NiCr films on a 0.1 mm thick alkali-free glass foil.

引用

页码：169 / 172

页数：4

共 8 条

[1] BASLER M, 1987, HYBRID CIRC TECH SEP, P79
[2] BERLICKI T, 1991, SENSOR ACTUAT A-PHYS, V25, P629
[3] BERLICKI T, 1989, 13TH C INT SOC HYBR, P157
[4] BERLICKI T, 1990, 10 TAG HOCHV GRENZFL, P136
[5] BERLICKI T, 1993, 16TH INT SPRING SEM, P64
[6] BOYER A, 1991, SENSOR ACTUAT A-PHYS, V25, P637
[7] THERMOELECTRIC INFRARED-SENSORS IN CMOS TECHNOLOGY
LENGGENHAGER, R
BALTES, H
ELBEL, T
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 : 216 - 220
[8] A HIGH-SENSITIVITY CMOS GAS-FLOW SENSOR ON A THIN DIELECTRIC MEMBRANE
MOSER, D
BALTES, H
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 : 33 - 37

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