TIME OF FLIGHT SPECTROMETER FOR SCANNING ELECTRON-MICROSCOPE

Experimental results which show the feasibility of use a time-of-flight spectrometer to obtain energy information of emitted electrons in a scanning electron microscope (SEM) are presented. The method is able to simultaneously display the energy distribution of emitted electrons over their entire energy range, from elastic backscattered electrons down to the low energy secondary electrons, and is thus predicted to have major signal-to-noise benefits for topographic, material, and voltage contrast in an SEM.