HIGH-SPEED MONOLITHICALLY INTEGRATED GAAS PHOTORECEIVER USING A METAL-SEMICONDUCTOR-METAL PHOTODIODE

被引:22
作者
ITO, M
KUMAI, T
HAMAGUCHI, H
MAKIUCHI, M
NAKAI, K
WADA, O
SAKURAI, T
机构
关键词
D O I
10.1063/1.96351
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1129 / 1131
页数:3
相关论文
共 6 条
[1]   MONOLITHIC INTEGRATION OF A METAL-SEMICONDUCTOR METAL PHOTODIODE AND A GAAS PREAMPLIFIER [J].
ITO, M ;
WADA, O ;
NAKAI, K ;
SAKURAI, T .
IEEE ELECTRON DEVICE LETTERS, 1984, 5 (12) :531-532
[2]  
ITO M, UNPUB
[3]   PLANAR MONOLITHIC INTEGRATION OF A PHOTO-DIODE AND A GAAS PRE-AMPLIFIER [J].
KOLBAS, RM ;
ABROKWAH, J ;
CARNEY, JK ;
BRADSHAW, DH ;
ELMER, BR ;
BIARD, JR .
APPLIED PHYSICS LETTERS, 1983, 43 (09) :821-823
[4]   A MONOLITHICALLY INTEGRATED ALGAAS/GAAS P-I-N/FET PHOTORECEIVER BY MOCVD [J].
MIURA, S ;
WADA, O ;
HAMAGUCHI, H ;
ITO, M ;
MAKIUCHI, M ;
NAKAI, K ;
SAKURAI, T .
IEEE ELECTRON DEVICE LETTERS, 1983, 4 (10) :375-376
[5]   MONOLITHIC INTEGRATION OF A PIN PHOTODIODE AND A FIELD-EFFECT TRANSISTOR USING A NEW FABRICATION TECHNIQUE - GRADED STEP PROCESS [J].
MIURA, S ;
MACHIDA, H ;
WADA, O ;
NAKAI, K ;
SAKURAI, T .
APPLIED PHYSICS LETTERS, 1985, 46 (04) :389-391
[6]   ALGAAS/GAAS P-I-N PHOTODIODE PREAMPLIFIER MONOLITHIC PHOTORECEIVER INTEGRATED ON A SEMI-INSULATING GAAS SUBSTRATE [J].
WADA, O ;
HAMAGUCHI, H ;
MIURA, S ;
MAKIUCHI, M ;
NAKAI, K ;
HORIMATSU, H ;
SAKURAI, T .
APPLIED PHYSICS LETTERS, 1985, 46 (10) :981-983