RAPID WRITING OF FINE LINES IN LANGMUIR-BLODGETT FILMS USING ELECTRON-BEAMS

被引:48
作者
BROERS, AN [1 ]
POMERANTZ, M [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1016/0040-6090(83)90399-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:323 / 329
页数:7
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