INSITU CHARACTERIZATION OF MOCVD GROWTH-PROCESSES BY LIGHT-SCATTERING TECHNIQUES

被引:42
作者
OLSON, JM
KIBBLER, A
机构
关键词
D O I
10.1016/0022-0248(86)90299-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:182 / 187
页数:6
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