ELLIPSOMETRIC STUDY OF ORIENTATION-DEPENDENT ETCHING OF SILICON IN AQUEOUS KOH

被引：126
作者：
PALIK, ED
BERMUDEZ, VM
GLEMBOCKI, OJ
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 04期
关键词：
D O I：
10.1149/1.2113976
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：871 / 884
页数：14
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