EFFECT OF GROWTH TEMPERATURE ON SUPERCONDUCTING PHASES OF AS-GROWN BISRCACUO THIN-FILM FORMED BY RF MAGNETRON SPUTTERING

被引：7
|
作者：
KURODA, K [1 ]
KOJIMA, K [1 ]
YOKOYAMA, K [1 ]
HAMANAKA, K [1 ]
机构：
[1] MITSUBISHI ELECTR CO, MAT & ELECTR DEVICES LAB, AMAGASAKI, HYOGO 661, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 11期
关键词：
BiSrCaCuO; Crystal structure; Sputtering; Superconducting phase; Superconductor; Thin films; XRD;
D O I：
10.1143/JJAP.29.L2033
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The effect of growth temperature on superconducting phases has been studied for BiSrCaCuO thin films grown on MgO(100) infstrates at temperatures in the range 500–660°C by RF magnetron sputtering from three targets. The chemical compositions of the metal elements of the films formed at each infstrate temperature were adjusted to Bi:(Sr+Ca):Cu=2:3:2, 2:3.5:2.5 and 2:4:3. Low-Tcphases (232 phases), 232/243 phases and high-Tcphases (243 phases) were obtained above 580°C with the 2:3:2 composition, above 590°C with the 2:3.5:2.5 composition, and above 620°C with the 2:4:3 composition. © 1990 IOP Publishing Ltd.
引用
收藏
页码：L2033 / L2036
页数：4
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