OXYGEN SELF-DIFFUSION STUDIES USING NEGATIVE-ION SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引:110
作者
KILNER, JA [1 ]
STEELE, BCH [1 ]
ILKOV, L [1 ]
机构
[1] HIGHER INST CHEM TECHNOL,DEPT SEMICOND,BU-1156 SOFIA,BULGARIA
关键词
D O I
10.1016/0167-2738(84)90134-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:89 / 97
页数:9
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