ALUMINUM POLYIMIDE INTERFACE FORMATION - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF SELECTIVE CHEMICAL BONDING

被引：131
作者：
ATANASOSKA, L
ANDERSON, SG
MEYER, HM
LIN, Z
WEAVER, JH
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 06期
关键词：
D O I：
10.1116/1.574191
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：3325 / 3333
页数：9
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