HIGH-QUALITY SI-ON-SIO2 FILMS BY LARGE DOSE OXYGEN IMPLANTATION AND LAMP ANNEALING

[1] CELLER GK, 1985, MATER RES SOC S P, V35, P636

[2] CELLER GK, 1984, APPL PHYS LETT, V43, P868

[3] Chen C.-E., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P702

[4] CRISTOLOVEANU S, 1985, 4TH P INT C INS FILM

[5] THEORY OF DIFFUSION-LIMITED PRECIPITATION [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1958, 6 (04) : 335 - 351

[6] FORMATION OF BURIED INSULATING LAYERS IN SILICON BY THE IMPLANTATION OF HIGH-DOSES OF OXYGEN [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 157 - 164

[7] HIGH-QUALITY SILICON ON INSULATOR STRUCTURES FORMED BY THE THERMAL REDISTRIBUTION OF IMPLANTED NITROGEN [J]. APPLIED PHYSICS LETTERS, 1985, 46 (10) : 952 - 954

[8] HEMMENT PLF, 1985, MAY MAT RES SOC S P

[9] INFLUENCE OF SUBSTRATE-TEMPERATURE ON THE FORMATION OF BURIED OXIDE AND SURFACE CRYSTALLINITY DURING HIGH-DOSE OXYGEN IMPLANTATION INTO SI [J]. APPLIED PHYSICS LETTERS, 1984, 45 (10) : 1081 - 1083

[10] IZUMI K, 1984, MATER RES SOC S P, V23, P443

[1] CELLER GK, 1985, MATER RES SOC S P, V35, P636

[2] CELLER GK, 1984, APPL PHYS LETT, V43, P868

[3] Chen C.-E., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P702

[4] CRISTOLOVEANU S, 1985, 4TH P INT C INS FILM

[5] THEORY OF DIFFUSION-LIMITED PRECIPITATION [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1958, 6 (04) : 335 - 351

[6] FORMATION OF BURIED INSULATING LAYERS IN SILICON BY THE IMPLANTATION OF HIGH-DOSES OF OXYGEN [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 157 - 164

[7] HIGH-QUALITY SILICON ON INSULATOR STRUCTURES FORMED BY THE THERMAL REDISTRIBUTION OF IMPLANTED NITROGEN [J]. APPLIED PHYSICS LETTERS, 1985, 46 (10) : 952 - 954

[8] HEMMENT PLF, 1985, MAY MAT RES SOC S P

[9] INFLUENCE OF SUBSTRATE-TEMPERATURE ON THE FORMATION OF BURIED OXIDE AND SURFACE CRYSTALLINITY DURING HIGH-DOSE OXYGEN IMPLANTATION INTO SI [J]. APPLIED PHYSICS LETTERS, 1984, 45 (10) : 1081 - 1083

[10] IZUMI K, 1984, MATER RES SOC S P, V23, P443