QUANTIFICATION OF THE EFFECTS OF GENERATION VOLUME, SURFACE RECOMBINATION VELOCITY, AND DIFFUSION LENGTH ON THE ELECTRON-BEAM-INDUCED CURRENT AND ITS DERIVATIVE - DETERMINATION OF DIFFUSION LENGTHS IN THE LOW MICRON AND SUB-MICRON RANGES

被引：70
作者：
LUKE, KL
VONROOS, O
CHENG, LJ
机构：
[1] CALTECH,JET PROP LAB,PASADENA,CA 91109
[2] STANFORD UNIV,STANFORD,CA 94305
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 06期
关键词：
D O I：
10.1063/1.334382
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1978 / 1984
页数：7
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