MECHANISMS OF DAMAGE RECOVERY IN ION-IMPLANTED SIO2

被引：26
作者：
DEVINE, RAB
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 02期
关键词：
D O I：
10.1063/1.333949
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：563 / 565
页数：3
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