AUTODOPING OF SILICON FILMS GROWN EPITAXIALLY ON SAPPHIRE

被引：55

作者：

DUMIN, DJ

ROBINSON, PH

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1966年 / 113卷 / 05期

关键词：

D O I：

10.1149/1.2423997

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：469 / +

页数：1

共 11 条

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