HIGH-TEMPERATURE RAMAN STUDIES OF DIAMOND THIN-FILMS

Raman spectroscopy has become the definitive technique for assessing the quality of diamond thin films. Not only can the diamond/graphite contents be determined, but more detailed information, for example, about the domain size and the stress associated with a coating can be gleaned. The results of a Raman microprobe study of synthetic diamond coatings on silicon and alumina substrates, at elevated temperatures (up to 750°C) in controlled atmospheres of hydrogen, argon and oxygen are presented. The position of the Raman band associated with crystalline diamond (1332 cm-1) was monitored as a function of temperature. From the shift of the Raman band from its natural position, an associated stress value can be obtained. © 1992.