OXIDE MICRO-PRECIPITATES IN AS-GROWN CZ SILICON

被引：52

作者：

INOUE, N

OSAKA, J

WADA, K

机构：

来源：

关键词：

D O I：

10.1149/1.2123679

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2780 / 2788

页数：9

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JACKSON, KA ;

LOWE, CW ;

PATEL, JR .

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