OPTICAL-EMISSION FROM NEON OXYGEN RF SPUTTERING GLOW-DISCHARGES

被引：26

作者：

AITA, CR

MARHIC, ME

机构：

[1] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201

[2] NORTHWESTERN UNIV,DEPT ELECT ENGN & COMP SCI,EVANSTON,IL 60201

[3] GOULD INC,ELECTR & ELECT RES LABS,ROLLING MEADOWS,IL 60008

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 01期

关键词：

D O I：

10.1116/1.572312

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：69 / 73

页数：5

共 20 条

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[2] ARGON-OXYGEN INTERACTION IN RF-SPUTTERING GLOW-DISCHARGES [J].

AITA, CR ;

MARHIC, ME .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) :6584-6587

[3]

AITA CR, UNPUB

[4] DISSOCIATIVE EXCITATION TRANSFER AND OPTICAL MASER OSCILLATION IN NE-02 AND AR-O2 RF DISCHARGES [J].

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MCFARLAND, RA ;

FAUST, WL ;

PATEL, CKN .

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[5]

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[6]

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[7]

COBURN JW, 1971, SOLID STATE TECHNOL, V12, P49

[8]

DIEKE GH, 1963, AM I PHYSICS HDB, P7

[9]

GARBUNY M, 1966, OPTICAL PHYSICS, P103

[10]

Herzberg G, 1959, SPECTRA DIATOMIC MOL

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