RECENT DEVELOPMENTS IN ELLIPSOMETRY THAT ARE USEFUL FOR THIN-FILM STUDIES

被引：8
|
作者：
KINOSITA, K [1 ]
YAMAMOTO, M [1 ]
机构：
[1] GAKUSHUIN UNIV,DEPT PHYS,MEJIRO,TOKYO 171,JAPAN
来源：
THIN SOLID FILMS | 1976年 / 34卷 / 02期
关键词：
D O I：
10.1016/0040-6090(76)90477-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：283 / 290
页数：8
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