RECENT DEVELOPMENTS IN ELLIPSOMETRY THAT ARE USEFUL FOR THIN-FILM STUDIES

被引:8
作者
KINOSITA, K [1 ]
YAMAMOTO, M [1 ]
机构
[1] GAKUSHUIN UNIV,DEPT PHYS,MEJIRO,TOKYO 171,JAPAN
关键词
D O I
10.1016/0040-6090(76)90477-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:283 / 290
页数:8
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