LOW-TEMPERATURE PREPARATION OF AS-SPUTTERED SUPERCONDUCTING YBACUO THIN-FILMS BY MAGNETRON SPUTTERING

被引:17
作者
MIURA, T [1 ]
TERASHIMA, Y [1 ]
SAGOI, M [1 ]
KUBO, K [1 ]
机构
[1] TOSHIBA RES & DEV CTR, KAWASAKI, KANAGAWA 210, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 07期
关键词
D O I
10.1143/JJAP.27.L1260
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L1260 / L1261
页数:2
相关论文
共 14 条
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