STABLE PHOTOINDUCED PARAMAGNETIC DEFECTS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE

被引:53
作者
KRICK, DT [1 ]
LENAHAN, PM [1 ]
KANICKI, J [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.98362
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:608 / 610
页数:3
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