TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF THE POLYCRYSTALLINE SILICON-SIO2 INTERFACE

被引：19

作者：

BRAVMAN, JC

SINCLAIR, R

机构：

来源：

THIN SOLID FILMS | 1983年 / 104卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(83)90556-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：153 / 161

页数：9

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