SPUTTERED C-AXIS INPLANE ZNO FILMS FOR SHEAR-WAVE RESONATORS

被引：0
|
作者：
WANG, JS
LAKIN, KM
机构：
[1] IOWA STATE UNIV SCI & TECHNOL,MICROELECTR RES CTR,AMES,IA 50011
[2] IOWA STATE UNIV SCI & TECHNOL,US DOE,AMES LAB,AMES,IA 50011
来源：
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1983年 / 30卷 / 03期
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D O I：
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中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
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页码：187 / 187
页数：1
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