FORMATION OF GAAS RIDGE QUANTUM-WIRE STRUCTURES BY MOLECULAR-BEAM EPITAXY ON PATTERNED SUBSTRATES

被引:154
作者
KOSHIBA, S
NOGE, H
AKIYAMA, H
INOSHITA, T
NAKAMURA, Y
SHIMIZU, A
NAGAMUNE, Y
TSUCHIYA, M
KANO, H
SAKAKI, H
WADA, K
机构
[1] UNIV TOKYO, ADV SCI & TECHNOL RES CTR, MEGURO KU, TOKYO 153, JAPAN
[2] NIPPON TELEGRAPH & TEL PUBL CORP, LSI LABS, ATSUGI, KANAGAWA 24301, JAPAN
关键词
D O I
10.1063/1.111967
中图分类号
O59 [应用物理学];
学科分类号
摘要
A ridge quantum wire structure has been successfully fabricated on a patterned (001) GaAs substrate by first growing a (111)B facet structure with a very sharp ridge and then depositing a thin GaAs quantum well on its top. Electron microscope study has shown that a GaAs wire with the effective lateral width of 17-18 nm is formed at the ridge top. Photoluminescence and cathodoluminescence measurements indicate that one of the luminescence lines comes from the wire region at the ridge and its blue shift (approximately 60 meV) agrees with the quantum confined energy calculated for the observed wire structure.
引用
收藏
页码:363 / 365
页数:3
相关论文
共 24 条
[1]   (ALAS)1/2(GAAS)1/2 FRACTIONAL-LAYER SUPERLATTICES GROWN ON (001) VICINAL GAAS SUBSTRATES BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION [J].
FUKUI, T ;
SAITO, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (04) :1373-1377
[2]   NEW GAAS QUANTUM WIRES ON (111)B FACETS BY SELECTIVE MOCVD [J].
FUKUI, T ;
ANDO, S .
ELECTRONICS LETTERS, 1989, 25 (06) :410-412
[3]   DISTRIBUTIONS OF GROWTH-RATES ON PATTERNED SURFACES MEASURED BY SCANNING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION [J].
HATA, M ;
ISU, T ;
WATANABE, A ;
KATAYAMA, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (04) :692-696
[4]  
INOSHITA T, UNPUB
[5]   STIMULATED-EMISSION IN SEMICONDUCTOR QUANTUM WIRE HETEROSTRUCTURES [J].
KAPON, E ;
HWANG, DM ;
BHAT, R .
PHYSICAL REVIEW LETTERS, 1989, 63 (04) :430-433
[6]   CALCULATION OF TWO-DIMENSIONAL QUANTUM-CONFINED STRUCTURES USING THE FINITE-ELEMENT METHOD [J].
KOJIMA, K ;
MITSUNAGA, K ;
KYUMA, K .
APPLIED PHYSICS LETTERS, 1989, 55 (09) :882-884
[7]  
KOSHIBA S, 1993, I PHYS C SER, V129, P931
[8]  
KOSHIBA S, UNPUB
[9]   QUASI-ONE-DIMENSIONAL ELECTRON-GAS AND ITS MAGNETIC DEPOPULATION IN A QUANTUM-WIRE PREPARED BY OVERGROWTH ON A CLEAVED EDGE OF ALGAAS/GAAS MULTIPLE-QUANTUM WELLS [J].
MOTOHISA, J ;
SAKAKI, H .
APPLIED PHYSICS LETTERS, 1993, 63 (13) :1786-1788
[10]   ENHANCED CRYSTALLOGRAPHIC SELECTIVITY IN MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS ON MESAS AND FORMATION OF (001)-(111)B FACET STRUCTURES FOR EDGE QUANTUM WIRES [J].
NAKAMURA, Y ;
KOSHIBA, S ;
TSUCHIYA, M ;
KANO, H ;
SAKAKI, H .
APPLIED PHYSICS LETTERS, 1991, 59 (06) :700-702