PRODUCTION OF SILICON SINGLE-CRYSTALS AND WAFERS

被引：0
|
作者：
ABE, Y
机构：
来源：
DENKI KAGAKU | 1986年 / 54卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：662 / 666
页数：5
相关论文
共 50 条
  • [1] EROSION OF SILICON SINGLE-CRYSTALS
    ROUTBORT, JL
    SCATTERGOOD, RO
    KAY, EW
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1980, 63 (11-1) : 635 - 640
  • [2] EROSION OF SILICON SINGLE-CRYSTALS
    ROUTBORT, JL
    SCATTERGOOD, RO
    AMERICAN CERAMIC SOCIETY BULLETIN, 1980, 59 (03): : 363 - 363
  • [3] HETEROJUNCTIONS OF AMORPHOUS SILICON AND SILICON SINGLE-CRYSTALS
    FUHS, W
    NIEMANN, K
    STUKE, J
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1974, 19 (03): : 394 - 394
  • [4] CASTING LARGE SILICON SINGLE-CRYSTALS
    SCHMID, F
    JOURNAL OF ELECTRONIC MATERIALS, 1976, 5 (04) : 436 - 437
  • [5] SWIRL DEFECTS IN SILICON SINGLE-CRYSTALS
    CHIKAWA, J
    YOSHIKAWA, S
    SOLID STATE TECHNOLOGY, 1980, 23 (01) : 65 - 70
  • [6] SILICON SINGLE-CRYSTALS OF EXTREME PERFECTION
    不详
    MICROELECTRONICS AND RELIABILITY, 1974, 13 (02): : 149 - &
  • [7] LASER GROWN SINGLE-CRYSTALS OF SILICON
    BAUERLE, D
    LEYENDECKER, G
    WAGNER, D
    BAUSER, E
    LU, YC
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 30 (03): : 147 - 149
  • [8] MICROSTRESS DISTRIBUTIONS IN SINGLE-CRYSTALS OF SILICON
    PROVAN, JW
    GHONEM, H
    CANADIAN METALLURGICAL QUARTERLY, 1976, 15 (04) : 319 - 324
  • [9] EXTENDED DEFECTS IN SILICON SINGLE-CRYSTALS
    TIKHONOV, LV
    KHARKOVA, GV
    GOLUB, TV
    FIZIKA TVERDOGO TELA, 1986, 28 (04): : 1193 - 1194
  • [10] DYNAMICAL YIELDING OF SILICON SINGLE-CRYSTALS
    BUCHAR, J
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1973, 19 (02): : 661 - 670
12345