SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION

被引：624
作者：
SRINIVASAN, R
MAYNEBANTON, V
机构：
来源：
APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 06期
关键词：
D O I：
10.1063/1.93601
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：576 / 578
页数：3
相关论文
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