ION-BOMBARDMENT INDUCED SURFACE-TOPOGRAPHY MODIFICATION OF CLEAN AND CONTAMINATED SINGLE-CRYSTAL CU AND SI

被引：28
作者：
LEWIS, GW
KIRIAKIDES, G
CARTER, G
NOBES, MJ
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1982年 / 4卷 / 04期
关键词：
D O I：
10.1002/sia.740040404
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：141 / 150
页数：10
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