PHOTOPATTERNING AND SELECTIVE ELECTROLESS METALLIZATION OF SURFACE-ATTACHED LIGANDS

被引：132

作者：

DRESSICK, WJ ^{[1
]}

DULCEY, CS ^{[1
]}

GEORGER, JH ^{[1
]}

CALVERT, JM ^{[1
]}

机构：

[1] GEOCENTERS INC,FT WASHINGTON,MD 20744

来源：

CHEMISTRY OF MATERIALS | 1993年 / 5卷 / 02期

关键词：

D O I：

10.1021/cm00026a002

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Organosilanes possessing ligating functions are chemisorbed to surfaces as monolayer thickness films. Patterned deep UV irradiation selectively destroys the ligating ability in the irradiated regions of the film. The resulting surface selectively binds Pd(II) from solution. The bound Pd(II) functions as an electroless catalyst for the deposition of patterned metal films useful in microlithographic applications.

引用

页码：148 / 150

页数：3

共 19 条

[1] COORDINATION CHEMISTRY IN 2 DIMENSIONS - CHEMICALLY MODIFIED ELECTRODES [J].