DISSOCIATIVE CHEMISORPTION OF NF3 AT SI(100) SURFACES

被引：0
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作者：
SHORTER, JA
LANGAN, JG
STEINFELD, JI
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来源：
SURFACE SCIENCE | 1989年 / 219卷 / 03期
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中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
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页码：L560 / L564
页数：5
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