OXIDATION OF CRNX HARD COATINGS REACTIVELY SPUTTERED AT LOW-TEMPERATURE

被引：30
作者：
NAVINSEK, B
PANJAN, P
机构：
[1] J. Stefan Institute, 61111 Ljubljana
来源：
THIN SOLID FILMS | 1993年 / 223卷 / 01期
关键词：
D O I：
10.1016/0040-6090(93)90718-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：4 / 6
页数：3
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