ION SPUTTERING OF ALLOYS

被引:53
作者
PICKERING, HW [1 ]
机构
[1] PENN STATE UNIV,DEPT MAT SCI,MET SECT,UNIVERSITY PK,PA 16802
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 02期
关键词
D O I
10.1116/1.569045
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:618 / 621
页数:4
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