A SPUTTERING WIND

被引：117
作者：
HOFFMAN, DW
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.572994
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：561 / 566
页数：6
相关论文
共 12 条
[1]  
CAMBEL AB, 1961, HDB FLUID DYNAMICS
[2]  
CARTER G, 1968, ION BOMBARDMENT SOLI, P6
[3]   SWARM ANALYSIS BY USING TRANSPORT-EQUATIONS .8. ELECTROPHORESIS IN A CYLINDRICAL POSITIVE-COLUMN [J].
DOTE, T ;
SHIMADA, M .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1983, 52 (06) :2025-2034
[4]   STRESS AND PROPERTY CONTROL IN SPUTTERED METAL-FILMS WITHOUT SUBSTRATE BIAS [J].
HOFFMAN, DW .
THIN SOLID FILMS, 1983, 107 (04) :353-358
[5]   DESIGN AND CAPABILITIES OF A NOVEL CYLINDRICAL-POST MAGNETRON SPUTTERING SOURCE [J].
HOFFMAN, DW .
THIN SOLID FILMS, 1982, 96 (03) :217-224
[6]  
HOFFMAN DW, 1982, 7TH P ICVM TOK, P145
[7]  
LANGMUIR J, 1923, J FRANKLIN I, V196, P751
[8]  
PATTERSON GN, 1971, INTRO KINETIC THEORY, P99
[9]   ENERGETIC BINARY COLLISIONS IN RARE-GAS PLASMAS [J].
ROBINSON, RS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :185-188
[10]  
SOMEKH RE, 1984, J VAC SCI TECHNOL A, V2, P1285, DOI 10.1116/1.572396
12