ON THE THERMAL-OXIDATION OF TITANIUM-IMPLANTED COPPER-FILMS

被引：8

作者：

SVENDSEN, LG

ESKILDSEN, SS

BORGESEN, P

机构：

[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK

[2] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER

来源：

THIN SOLID FILMS | 1983年 / 110卷 / 03期

关键词：

D O I：

10.1016/0040-6090(83)90241-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：237 / 240

页数：4

共 9 条

[1] DEPTH PROFILING BY ION-BEAM SPECTROMETRY [J].

BORGESEN, P ;

BEHRISCH, R ;

SCHERZER, BMU .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 27 (04) :183-195

[2]

Borgesen P., UNPUB

[3]

Chu WK., 1978, BACKSCATTERING SPECT

[4] THE ALTERATION OF OXIDATION AND RELATED PROPERTIES OF METALS BY ION-IMPLANTATION [J].

DEARNALEY, G .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :899-914

[5] INFLUENCE OF ION-IMPLANTATION ON THERMAL-OXIDATION OF COPPER [J].

MORRIS, JR ;

COLLINS, RA ;

DEARNALEY, G .

JOURNAL OF PHYSICS F-METAL PHYSICS, 1978, 8 (06) :1333-1342

[6]

RICKARDS J, 1974, 1974 P INT C APPL IO, P101

[7] COMPARISON OF THE CORROSION PROTECTION OF COPPER BY ION-IMPLANTATION OF AL AND CR [J].

SVENDSEN, LG .

CORROSION SCIENCE, 1980, 20 (01) :63-68

[8] CORROSION INHIBITION BY ION-IMPLANTATION OF AL OR MG IN CU, INVESTIGATED BY RBS [J].

SVENDSEN, LG ;

BORGESEN, P .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3) :141-145

[9]

SVENDSEN LG, 1978, THESIS U AARHUS

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