SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP

被引：840
作者：
BIERSACK, JP
ECKSTEIN, W
机构：
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 34卷 / 02期
关键词：
D O I：
10.1007/BF00614759
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：73 / 94
页数：22
相关论文
共 71 条
[1]   SOME EFFECTS OF ION MASS ON THE ENERGY-SPECTRUM OF SPUTTERED GOLD ATOMS [J].
AHMAD, S ;
FARMERY, BW ;
THOMPSON, MW .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1981, 44 (06) :1387-1394
[2]   SELF-ION SPUTTERING YIELDS FOR COPPER, NICKEL, AND ALUMINUM [J].
ALLAS, RG ;
KNUDSON, AR ;
LAMBERT, JM ;
TREADO, PA ;
REYNOLDS, GW .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :615-619
[3]   COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J].
ALMEN, O ;
BRUCE, G .
NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :257-278
[4]  
Andersen H. H., 1977, HYDROGEN STOPPING PO
[5]   MEASUREMENTS OF ANGULAR-DISTRIBUTIONS OF SPUTTERED MATERIAL AS A NEW TOOL FOR SURFACE-SEGREGATION STUDIES - SEGREGATION IN CUPT ALLOYS [J].
ANDERSEN, HH ;
CHERNYSH, V ;
STENUM, B ;
SORENSEN, T ;
WHITLOW, HJ .
SURFACE SCIENCE, 1982, 123 (01) :39-46
[6]  
BAY HL, 1979, RADIAT EFF DEFECT S, V41, P77, DOI 10.1080/00337577908236950
[7]  
BECERRAACEVEDO R, 1984, NUCL INSTRUM METHODS
[8]   SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS [J].
BEHRISCH, R ;
MADERLECHNER, G ;
SCHERZER, BMU ;
ROBINSON, MT .
APPLIED PHYSICS, 1979, 18 (04) :391-398
[9]  
Behrisch R., 1981, TOPICS APPL PHYS, V47
[10]  
BENNINGHOVEN A, 1984, SPRINGER SER CHEM PH, V36
12345678