INELASTIC LIGHT-SCATTERING STUDIES OF SILICON CHEMICAL VAPOR-DEPOSITION (CVD) SYSTEMS

被引：58

作者：

SEDGWICK, TO ^{[1
]}

SMITH, JE ^{[1
]}

GHEZ, R ^{[1
]}

COWHER, ME ^{[1
]}

机构：

[1] IBM CORP,TJ WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598

来源：

JOURNAL OF CRYSTAL GROWTH | 1975年 / 31卷 / DEC期

关键词：

D O I：

10.1016/0022-0248(75)90140-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：264 / 273

页数：10

共 35 条

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[10] VAPOR-PHASE RAMAN-SPECTRA, RAMAN BAND CONTOUR ANALYSES, CORIOLIS CONSTANTS, AND FORCE CONSTANTS OF SPHERICAL-TOP MOLECULES MX4 (M = GROUP IV ELEMENT, X = F, CL, BR, OR I) [J].

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