NEGATIVE-ION FORMATION DUE TO HYDROGEN PLASMA-SURFACE INTERACTION

被引:3
作者
LEUNG, KN
EHLERS, KW
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D O I
10.1016/0022-3115(84)90437-9
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:694 / 697
页数:4
相关论文
共 5 条
[1]   MULTICUSP NEGATIVE-ION SOURCE [J].
EHLERS, KW ;
LEUNG, KN .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (06) :721-727
[2]   MECHANISM FOR NEGATIVE-ION PRODUCTION IN SURFACE-PLASMA NEGATIVE-HYDROGEN-ION SOURCE [J].
HISKES, JR ;
KARO, A ;
GARDNER, M .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :3888-3896
[3]   SELF-EXTRACTION NEGATIVE-ION SOURCE [J].
LEUNG, KN ;
EHLERS, KW .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1982, 53 (06) :803-809
[4]   INFLUENCE EXERTED BY THE PLASMA EDGE POTENTIAL ON RECYCLING, SPUTTERING AND IMPURITY ACCUMULATION [J].
OREN, L ;
KELLER, L ;
SCHWIRZKE, F ;
TALMADGE, S ;
TAYLOR, RJ .
JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :34-38
[5]  
SIEDL M, 1978, B AM PHYS SOC, V23, P804