X-RAY OBSERVATIONS OF ANOMALOUS ETCH PATTERNS IN SILICON CRYSTALS

被引：8
|
作者：
YUKIMOTO, Y
HIRANO, A
SUGIOKA, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1967年 / 6卷 / 03期
关键词：
D O I：
10.1143/JJAP.6.420
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：420 / &
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