X-RAY OBSERVATIONS OF ANOMALOUS ETCH PATTERNS IN SILICON CRYSTALS

被引：8

|

作者：

YUKIMOTO, Y

HIRANO, A

SUGIOKA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1967年 / 6卷 / 03期

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D O I：

10.1143/JJAP.6.420

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：420 / &

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